MEMS product
MEMS device
1 axis mirror / 2 axis mirror / Array
array
description
MEMS Mirror Array chips are fabricated 50 channels of mirrors in 20mm size, and each one can be driven in quasi-static mode stably.
applications
- VOA
- optical switch
- OCT probe
- LiDAR
- tracking sensor
product detail
| 1208 | |
|---|---|
 |
|
| Chip size(mm) | 8×8×1 |
| mirror shape | Rectangle |
| mirror size(mm) | 0.29×1.0 |
| mirror pitch(mm) | 0.3 |
| array#(ea) | >25 |
| mirror material | au |
| reflectivity(%) | >92% |
| mode | quasi-static |
| resonanace frequency(Hz) | 5000 |
| quasi-static frequency(hz) | max 100 |
| total tilt angle - 5v(deg) | 0~0.6 |
| total tilt angle - max voltage(deg) | 4~6 |
| max voltage | 60 |
| break voltage | 80 |
| type | COB |
| size | 50×50×5 |
| customizing | O |
| download |