MEMS product
MEMS device
1 axis mirror / 2 axis mirror / Array
2 axis mirror
description
Those can be actuated in either quasi-static or resonance drive mode. 2-Axis Mirrors offer fast and stable operation with high quality, based on MEMS’s own technology.
applications
- VOA
- optical switch
- OCT probe
- LiDAR
- tracking sensor
product detail
| A-0808 | B-0808 | B-3232 | |
|---|---|---|---|
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| Chip size(mm) | 8×8×1 | 8×8×1 | 8×8×1 |
| mirror shape | Ellipse | Circle | Ellipse |
| mirror size(mm) | 2.3×3 | 2 | 2.3×3 |
| mirror material | au | au | au |
| reflectivity(%) | >92% | >92% | >92% |
| Mode-X | Resonance | quasi-static | Resonance |
| resonanace frequency(Hz) | 1800-1900 | 750-850 | 1800-1900 |
| Total tilt angle - 5V | 0 | 0~0.6 | 0 |
| total tilt angle - max voltage | 6-8 | 8-10 | 6-8 |
| max voltage(V) | 60 | 140 | 60 |
| break voltage(V) | 80 | 160 | 80 |
| Mode - Y | quasi-static | quasi-static | quasi-static |
| Resonance frequency(Hz) | 210 | 750-850 | 210 |
| Total ilt angle -5V(Deg) | 0-0.6 | 0-0.6 | 0-0.6 |
| Total ilt angle max voltage(Deg) | 4-7 | 8-10 | 4-7 |
| Max voltage(V) | 130 | 140 | 130 |
| Break voltage(V) | 150 | 160 | 150 |
| type | LC48-PCB | LCC | LC48-PCB |
| size(mm) | 20×20×10 | 12×12×4 | 20×20×10 |
| Customizing | O | O | O |
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