MEMS product
MEMS device
1 axis mirror / 2 axis mirror / Array
1 axis mirror
description
MEMS’s 1-Axis Mirrors are consisted with torsional springs, comb-drive actuators and a tilting mirror which operates quasi-statically. They are applicable to optical scanning devices including LiDARs and scanners and optical communication components such as VOA.
applications
- VOA
- optical switch
- LiDAR
- tracking sensor
product detail
| 1208 | 3216 | |
|---|---|---|
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| Chip size(mm) | 12×8×0.75 | 3.2×1.6×1 |
| mirror shape | circle | rectangle/octagon |
| mirror material | au | au |
| reflectivity(%) | >92% | >92% |
| mode | quasi-static | quasi-static |
| resonanace frequency(Hz) | 500 | 400-600 |
| quasi-static frequency(hz) | max 100 | 100 |
| total tilt angle @ 5v(deg) | 0~0.6 | 0~0.6 |
| total tilt angle @max voltage(deg) | 3~5 | 0~1.2 |
| max voltage(V) | 140 | 15 |
| break voltage(V) | 160 | 25 |
| package type | plcc12 | to-46 |
| package size | 18×18×4 | ? |
| download |