MEMS product

MEMS foundry

design / fabrication / evaluation

evaluation

description

We have various systems for evaluation to fabrication steps, quality of devices and process.
With diverse semiconductor and MEMS device evaluation such as simulation, I-V, ellipsometer, etc, give customized solutions.

service detail

※ Provide customer-made order
	evaluation
Mirror test	Tilting angle, WDL, PDL, Flatness
Fabrication result	Ellipsometer, I-V, C-V, SEM, AFM, 3D profile, Bonding tester, etc.
Module specification	High temperature & humidity, Thermal shock, Vibration, etc.

deposition